On the stability of radio-frequency discharge

I. P. Iliev; S. G. Gocheva; Nikola V. Sabotinov

doi:10.1117/12.563118

21 June 2004 On the stability of radio-frequency discharge

I. P. Iliev, S. G. Gocheva, Nikola V. Sabotinov

Proceedings Volume 5449, Eighth International Conference on Laser and Laser Information Technologies; (2004) https://doi.org/10.1117/12.563118
Event: Eighth International Conference on Laser and Laser Information Technologies, 2003, Smolyan, Bulgaria

Abstract

The transition from weak to heavy current discharge in the cross-section of radio frequency helium discharge is numerically investigated. It is found the lowest possible voltage, so that this transition takes place. It is established a possible rise of a pre-gap of the discharge on a line, non coinciding with the minimum distance between the electrodes. The obtained results are in good agreement with the existing experimental data. The method is applied and investigations are made for constructive engineering solutions, influenced on the break-through process.

Citation Download Citation

I. P. Iliev, S. G. Gocheva, and Nikola V. Sabotinov "On the stability of radio-frequency discharge", Proc. SPIE 5449, Eighth International Conference on Laser and Laser Information Technologies, (21 June 2004); https://doi.org/10.1117/12.563118

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