15 September 2004 Thermo-optic tuning of silicon-on-insulator photonic crystal microcavity
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Abstract
We have experimentally realised a tunable photonic crystal microcavity with in-filling holes in silicon-on-insulator waveguide by using thermooptic effect. A thin film nichrome heater has been integrated onto the microcavity where a change in temperature (and consequent change in the refractive index of the silicon core) produced a peak resonance shift at the wavelength region λ = 1530 nm. A peak resonance shift of 5 nm towards longer wavelengths was achieved when the heater was switched on to a current of 1.2 mA - while maintaining high Q-factor value in the microcavity.
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Harold M. H. Chong, Harold M. H. Chong, Richard M. De La Rue, Richard M. De La Rue, } "Thermo-optic tuning of silicon-on-insulator photonic crystal microcavity", Proc. SPIE 5450, Photonic Crystal Materials and Nanostructures, (15 September 2004); doi: 10.1117/12.546203; https://doi.org/10.1117/12.546203
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