18 August 2004 Fabrication of photonic integrated circuits by DUV-induced modification of polymers
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Abstract
The expansion of high capacity optical transmission techniques into price-sensitive areas such as datacom and access networks requires a major reduction in the cost of optical components. Polymer waveguides are attractive because they are very simple to process and are promising for low-cost devices. Deep UV-induced modification of the dielectric properties of polymers is a useful technique for low cost realization of integrated optical circuits for telecommunication und sensor applications. The technique presented here has several advantages with respect to common methods because only a single polymer layer is used, which serves as the substrate and waveguide as well and no further etching or development step is required. The integration of the waveguide circuits in a polymer microoptical bench offers the possibility of combining the devices with semiconductor based optical circuits and also achieve easy fiber-chip coupling. In this work, preliminary results of Y-junctions, directional couplers, multimode interference (MMI) couplers will be given.
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Patric Henzi, Patric Henzi, Dominik Gerhard Rabus, Dominik Gerhard Rabus, Ulrike Wallrabe, Ulrike Wallrabe, Juergen Mohr, Juergen Mohr, } "Fabrication of photonic integrated circuits by DUV-induced modification of polymers", Proc. SPIE 5451, Integrated Optics and Photonic Integrated Circuits, (18 August 2004); doi: 10.1117/12.544481; https://doi.org/10.1117/12.544481
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