Photoluminescence and waveguiding in sputtered films of Er-doped chalcogenide glasses

Adam Fuchs; Jochen Fick; Viorel Balan; Caroline Vigreux; Annie Pradel

doi:10.1117/12.545740

18 August 2004 Photoluminescence and waveguiding in sputtered films of Er-doped chalcogenide glasses

Adam Fuchs, Jochen Fick, Viorel Balan, Caroline Vigreux, Annie Pradel

Author Affiliations +

Proceedings Volume 5451, Integrated Optics and Photonic Integrated Circuits; (2004) https://doi.org/10.1117/12.545740
Event: Photonics Europe, 2004, Strasbourg, France

Abstract

The spectral properties of Er³⁺-doped As₂S₃ and Ge₃₃As₁₂Se₅₅ chalcogenide glasses are presented and discussed. Bulk samples and thin films have been studied. Bulk samples have been obtained by melt-quenching. Thin films have been obtained by RF sputtering. Sputtering targets have been fabricated from home-made cut and polished doped bulk samples and from commercial undoped targets with erbium pieces on the surface. The film morphology has been analysed by AFM and a column-like structure has been observed for the Ge₃₃As₁₂Se₅₅ films. The presence of Er³⁺ ions in As₂S₃ and Ge₃₃As₁₂Se₅₅ films has been confirmed by PL emission at 1.55 µm. A PL lifetime of 4 ms has been measured in Er-doped As₂S₃ films. Single mode waveguides have been fabricated by wet etching in Ge₃₃As₁₂Se₅₅ films.

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Adam Fuchs, Jochen Fick, Viorel Balan, Caroline Vigreux, and Annie Pradel "Photoluminescence and waveguiding in sputtered films of Er-doped chalcogenide glasses", Proc. SPIE 5451, Integrated Optics and Photonic Integrated Circuits, (18 August 2004); https://doi.org/10.1117/12.545740

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