8 September 2004 Comparative study of glass and plastic refractive microlenses and their fabrication techniques
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Abstract
In this paper we review the most important fabrication techniques for glass and plastic refractive microlenses and we quantitatively characterize in a systematic way the corresponding state-of-the-art microlenses which we obtained from selected research groups. For all our measurements we rely on three optical instruments: a non-contact optical profiler, a transmission Mach-Zehnder interferometer and a Twyman-Green interferometer. To conclude we survey and discuss the different fabrication techniques by comparing the geometrical and optical characteristics of the microlenses.
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Heidi Ottevaere, Royall Cox, Hans Peter Herzig, Takaaki Miyashita, Kris Naessens, Mohammad R. Taghizadeh, Reinhard Volkel, H.J. Woo, Hugo Thienpont, "Comparative study of glass and plastic refractive microlenses and their fabrication techniques", Proc. SPIE 5453, Micro-Optics, VCSELs, and Photonic Interconnects, (8 September 2004); doi: 10.1117/12.546709; https://doi.org/10.1117/12.546709
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