8 September 2004 Polarization-controlled monolithic oxide-confined VCSELs
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We report on advances in the fabrication and performance of monolithic 850 nm, linearly polarized vertical-cavity surface-emitting lasers (VCSELs) incorporating a semiconductor surface grating at the outcoupling facet. Depending on the grating parameters, the light is polarized either parallel or perpendicular to the grating grooves. Deep-etched gratings enable complete polarization pinning even in directions that are 45 degrees off the preferred crystal axes. On the other hand, such devices can show strong side-lobes in the far-field which may limit the available output power for some applications. Shallow-etched VCSELs with almost undistorted far-fields deliver output powers as high as 29 mW with about 12 dB orthogonal polarization suppression ratio. A combination of surface relief and grating is used to increase the transverse single-mode output power while maintaining polarization stability.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Rainer Michalzik, Johannes M. Ostermann, Pierluigi Debernardi, Christof Jalics, Andrea Kroner, Martin Feneberg, Michael Riedl, "Polarization-controlled monolithic oxide-confined VCSELs", Proc. SPIE 5453, Micro-Optics, VCSELs, and Photonic Interconnects, (8 September 2004); doi: 10.1117/12.554945; https://doi.org/10.1117/12.554945

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