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Basic aspects of deep lithography with particles for the fabrication of micro-optical and micromechanical structures
Low-cost single-mode waveguide fabrication allowing passive fiber coupling using LIGA and UV flood exposure
Integration of multimode waveguides and micromirror couplers in printed circuit boards using laser ablation
High-precision surface mount assembly of micro-optical components per laser reflow soldering: positioning accuracy and thermal stability
Ellipsometric investigations of polished surface of glass/ceramic with ultralow coefficient of the temperature expansion