8 September 2004 Ellipsometric investigations of polished surface of glass/ceramic with ultralow coefficient of the temperature expansion
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Proceedings Volume 5454, Micro-Optics: Fabrication, Packaging, and Integration; (2004); doi: 10.1117/12.543878
Event: Photonics Europe, 2004, Strasbourg, France
Abstract
The results of ellipsometric investigations of surfaces of glassceramic samples with ultra low coefficient of thermal expansion are presented. These glassceramic samples are used in manufacturing of precision parts of optical instruments, for instance for telescope mirrors manufacturing. The aim of these investigations was to study the influence of the surface damaged layer and elastic deformations on the residual ellipticity of polished surfaces of glassceramic samples with ultra low temperature expansion coefficient. It was shown that with increasing of the surface layer polished depth damaged by grinding, the residual ellipticity decreases up to the value that remains a constant. Its value is determined by the material structure and stresses in the surface layer.
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Vladimir Petrovich Maslov, Anna Z. Sarsembaeva, Fiodor Fedorovych Sizov, "Ellipsometric investigations of polished surface of glass/ceramic with ultralow coefficient of the temperature expansion", Proc. SPIE 5454, Micro-Optics: Fabrication, Packaging, and Integration, (8 September 2004); doi: 10.1117/12.543878; https://doi.org/10.1117/12.543878
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