Low-cost single-mode waveguide fabrication allowing passive fiber coupling using LIGA and UV flood exposure

Patric Henzi; Dominik Gerhard Rabus; K. Bade; Ulrike Wallrabe; Juergen Mohr

doi:10.1117/12.544477

8 September 2004 Low-cost single-mode waveguide fabrication allowing passive fiber coupling using LIGA and UV flood exposure

Patric Henzi, Dominik Gerhard Rabus, K. Bade, Ulrike Wallrabe, Juergen Mohr

Author Affiliations +

Proceedings Volume 5454, Micro-Optics: Fabrication, Packaging, and Integration; (2004) https://doi.org/10.1117/12.544477
Event: Photonics Europe, 2004, Strasbourg, France

Abstract

A process of UV-induced fabrication of single mode waveguides in a polymer microoptical bench has been realized that offers the unique feature of an inexpensive microstructure replication process for mass fabrication. Instead of using common mask techniques for the realization of the stripe waveguides, a "Self-masking" technique of the polymer by embossing a microoptical bench and a following UV-flood-exposure is used. The mould insert, which is necessary for the replication process was made by the LIGA-technique. The fabrication of the micooptical bench and the waveguides in the same process step assures very good alignment accuracy and guarantees a low cost passive fiber-chip coupling and assembly. The photoinduced chemical reactions of different homo- and copolymers of methylmethacrylate under different environmental condition have been investigated. It was shown that depending on the environmental conditions during photoinduced waveguide generation, the physical and chemical properties of the waveguides can be adjusted in a wide range. The process allows the realization of devices for application in telecommunication and sensor technology.

Citation Download Citation

Patric Henzi, Dominik Gerhard Rabus, K. Bade, Ulrike Wallrabe, and Juergen Mohr "Low-cost single-mode waveguide fabrication allowing passive fiber coupling using LIGA and UV flood exposure", Proc. SPIE 5454, Micro-Optics: Fabrication, Packaging, and Integration, (8 September 2004); https://doi.org/10.1117/12.544477

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available