16 August 2004 A new micromachined optical fiber switch for instrumentation purposes
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We have developed a novel low-cost electrostatically actuated 1x2 fiber switch which basically consists of two active components only, i.e. metalized movable fibers and fixed electrodes. With this set-up, a direct movement and, additionally, a self-alignment of the fibers is performed. In contrary to other MEMS designs no complex moving parts are necessary. It is possible to fabricate the switch with low-cost polymer techniques. Driving voltages below 60V and switching times below 8ms have been demonstrated with these polymer devices. The optical fiber switch presented utilises electrostatic forces to move one incoming fiber with respect to the two outgoing fibers. Simultaneous application of the actuation voltage to the inlet fiber and the respective outlet fiber will pull both fibers into the same corner of the actuation chamber, where they settle in a perfect optical alignment.
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Mark Herding, Gergoe Somogyi, Ulrich Mescheder, Peter Woias, "A new micromachined optical fiber switch for instrumentation purposes", Proc. SPIE 5455, MEMS, MOEMS, and Micromachining, (16 August 2004); doi: 10.1117/12.544798; https://doi.org/10.1117/12.544798

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