16 August 2004 CMOS-compatible RF MEMS switch
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Abstract
Mobile technologies have relied on RF switches for a long time. Though the basic function of the switch has remained the same, the way they have been made has changed in the recent past. In the past few years work has been done to use MEMS technologies in designing and fabricating an RF switch that would in many ways replace the electronic and mechanical switches that have been used for so long. The work that is described here is an attempt to design and fabricate an RF MEMS switch that can handle higher RF power and have CMOS compatible operating voltages.
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Narendra V. Lakamraju, Narendra V. Lakamraju, Bruce Kim, Bruce Kim, Stephen M. Phillips, Stephen M. Phillips, } "CMOS-compatible RF MEMS switch", Proc. SPIE 5455, MEMS, MOEMS, and Micromachining, (16 August 2004); doi: 10.1117/12.544120; https://doi.org/10.1117/12.544120
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