Deep lithography with protons as an alternative fabrication technology for high-precision 2D fiber connector components

Bart Volckaerts; Rafal G. Krajewski; Pedro Vynck; Heidi Ottevaere; Jan A. Watte; Daniel Daems; Alex Hermanne; Hugo Thienpont

doi:10.1117/12.547719

16 August 2004 Deep lithography with protons as an alternative fabrication technology for high-precision 2D fiber connector components

Bart Volckaerts, Rafal G. Krajewski, Pedro Vynck, Heidi Ottevaere, Jan A. Watte, Daniel Daems, Alex Hermanne, Hugo Thienpont

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Proceedings Volume 5455, MEMS, MOEMS, and Micromachining; (2004) https://doi.org/10.1117/12.547719
Event: Photonics Europe, 2004, Strasbourg, France

Abstract

We present Deep Lithography with Protons (DLP) for the fabrication of ultra-dense fiber coupling elements which consist of circular, conical-shaped alignment features, ordered in a 2D array with high-precision pitches. This technology relies on the irradiation of PMMA-resist layers with a swift proton beam featuring a well-defined circular shape, followed by a selective development of these exposed zones. To increase the coupling efficiency, the DLP-technology allows to integrate uniform spherical micro-lenses, which are created by a controlled swelling of the proton-bombarded domains in a monomer vapor, in front of the micro-alignment holes. We will first discuss our work on the improvement of the DLP irradiation and development process step to enhance the coupling efficiency and the field-installability of the connector components. Furthermore, we will illustrate the optical design of micro-lens arrays and their integration in fiber connectors with improved tolerances.

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Bart Volckaerts, Rafal G. Krajewski, Pedro Vynck, Heidi Ottevaere, Jan A. Watte, Daniel Daems, Alex Hermanne, and Hugo Thienpont "Deep lithography with protons as an alternative fabrication technology for high-precision 2D fiber connector components", Proc. SPIE 5455, MEMS, MOEMS, and Micromachining, (16 August 2004); https://doi.org/10.1117/12.547719

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KEYWORDS

Connectors

Digital Light Processing

Single mode fibers

Polymethylmethacrylate

Tolerancing

Spherical lenses

Lithography

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