16 August 2004 Infrared MEMS-based Lamellar grating spectrometer
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Abstract
We present a lamellar grating interferometer realized with MEMS technology. It is used as time-scanning Fourier transform spectrometer. The motion is carried out by an electrostatic comb drive actuator fabricated by silicon micromachining, particularly by silicon-on-insulator technology. We have measured the spectrum of an extended white light source with a resolution of 1.2 nm at a wavelength of 436 nm, and of 13 nm at 1544 nm. The wavelength accuracy is better than 0.5 nm and the inspected wavelength range extends from 380 nm to 1700 nm. The optical path difference maximum is 226 μm and is limited by the mechanical instability of the actuator. The dimension of the device is 7 mm x 8 mm x 0.5 mm. The device includes two individual lamellar grating spectrometers operated by the same actuator, allowing the immediate calibration of the optical path difference.
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Omar Manzardo, Felix Shadelin, Wilfried Noell, Nicolaas F. de Rooij, Hans Peter Herzig, "Infrared MEMS-based Lamellar grating spectrometer", Proc. SPIE 5455, MEMS, MOEMS, and Micromachining, (16 August 2004); doi: 10.1117/12.545587; https://doi.org/10.1117/12.545587
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