16 August 2004 Integrated asymmetric vertical coupler pressure sensors
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Abstract
Design and analysis of a novel pressure sensor based on a silicon-on-insulator asymmetric integrated vertical coupler is presented. The coupler is composed of a single mode low index waveguide and a thin silicon slab. Wavelength selective optical modulation of asymmetric vertical coupler is examined in detail. Its potential for sensing applications is highlighted as an integrated optical pressure sensor which can be realized by standard silicon micro-fabrication. Sensitivity of transmission of such couplers on refractive index change of silicon slab ensures that they are good candidates for applications requiring high sensitivities.
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Isa Kiyat, Isa Kiyat, Askin Kocabas, Askin Kocabas, Imran Akcag, Imran Akcag, Atilla Aydinli, Atilla Aydinli, } "Integrated asymmetric vertical coupler pressure sensors", Proc. SPIE 5455, MEMS, MOEMS, and Micromachining, (16 August 2004); doi: 10.1117/12.546070; https://doi.org/10.1117/12.546070
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