16 August 2004 Polymer-based pixel matrix display in MOEMS technology
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Abstract
The proposed pixel matrix display consists of two plastic elements: a planar waveguide which plays the role of a light reservoir and a deformable thin membrane with a matrix of pillars. On the bottom side of the membrane that touches the light reservoir there is an electrode surrounding all pillars and leaving tops of pillars transparent. The light reservoir has a matrix of individual electrical contacts so that the display can be addressed pixel by pixel and switched on by applying a voltage to the electrical contacts on the light reservoir and the membrane electrode. The electrostatic force locally deforms the membrane and puts the pillars in contact with the light reservoir, therefore, coupling light into the membrane. A demonstrator of a polymer-based pixel matrix display is fabricated in MOEMS technology. The proof-of-principle experiment is made on a 20x20 pixel matrix with an active display matrix area of 5x5 mm2, a light emitting diode illumination and 80 V applied to address pixels.
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Ryszard R. Buczynski, Ryszard R. Buczynski, Stefan Kufner, Stefan Kufner, Rafal Kasztelanic, Rafal Kasztelanic, Arkadiusz Sagan, Arkadiusz Sagan, Ines Frese, Ines Frese, Thomas Klotzbucher, Thomas Klotzbucher, Tomasz Szoplik, Tomasz Szoplik, } "Polymer-based pixel matrix display in MOEMS technology", Proc. SPIE 5455, MEMS, MOEMS, and Micromachining, (16 August 2004); doi: 10.1117/12.548753; https://doi.org/10.1117/12.548753
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