16 August 2004 Static and dynamic characterization of MEMS and MOEMS devices using optical interference microscopy
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Abstract
We report on characterization techniques for microstructures using white-light interference microscopy. Capabilities include surface profilometry, integrated profilometry and lateral metrology for full 3D characterization, defect detection, profilometry of thin film structures, stroboscopic interferometry of vibrating samples, and real-time profile snapshots of moving MEMS devices.
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David Grigg, Eric Felkel, John Roth, Xavier Colonna de Lega, Leslie Deck, Peter J. de Groot, "Static and dynamic characterization of MEMS and MOEMS devices using optical interference microscopy", Proc. SPIE 5455, MEMS, MOEMS, and Micromachining, (16 August 2004); doi: 10.1117/12.546211; https://doi.org/10.1117/12.546211
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