Paper
10 September 2004 Design aspects in the development of a standing wave interferometer
Author Affiliations +
Abstract
A novel interferometer based on sampling the maxima and minima of intensity of an optical standing wave has been developed. The photoelectric detection of the standing wave is performed by using a partially transparent thin-film photodiode. The automatic bidirectional fringe counting is provided by a partially transparent and phase-sensitive detector which is realized by the integration of two stacked transparent photodiodes along the optical axis of the standing wave. To obtain the ideal sine and cosine signals, the transparent phase-sensitive detector has to be optimized by adjusting the thickness of the single layers. Some features of optimization will be presented and explained. Length measurements have been demonstrated by displacing the plane mirror and bidirectional fringe counting within the standing wave.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Viktor Mandryka, Hans Buchner, and Gerd Jager "Design aspects in the development of a standing wave interferometer", Proc. SPIE 5457, Optical Metrology in Production Engineering, (10 September 2004); https://doi.org/10.1117/12.546708
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Cited by 1 scholarly publication.
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KEYWORDS
Sensors

Mirrors

Photodiodes

Interferometers

Reflectivity

Phase shifts

Reflection

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