10 September 2004 New approaches in depth-scanning optical metrology
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Abstract
Depth-scanning is an established technique in macroscopic and microscopic 3-D metrology. Representative in this context are the confocal technique and the white-light interferometry. A new fast depth-scanning technique has been applied to a confocal point sensor to be used in a laser-welding application for in-process measurement. The depth measurement range can be extended to about +/-1 mm at about 1500 measurement cycles per second. The possibilities and the potential of these techniques are described. Another principle of depth-scanning is the chromatic confocal technique. In connection with a new approach, an innovative confocal setup enables the parallelization of the complete depth-scan for the complete measurement of a line cut of moved objects. In the macroscopic scale, the new measurement techniques of depth-scanning fringe projection (DSFP) was introduced recently. In the microscopic scale, it has been implemented successfully in a stereo microscope.
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Klaus Korner, Klaus Korner, Aiko K. Ruprecht, Aiko K. Ruprecht, Tobias F. Wiesendanger, Tobias F. Wiesendanger, } "New approaches in depth-scanning optical metrology", Proc. SPIE 5457, Optical Metrology in Production Engineering, (10 September 2004); doi: 10.1117/12.554754; https://doi.org/10.1117/12.554754
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