10 September 2004 Short coherence transmitted light interferometer for the thickness measurement of Si membranes
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Abstract
As is shown the thickness of thin membranes and MEMS can be measured using a transmission short coherence interference technique and choosing a suitable wavelength range in the infrared. The method evaluates the phase difference between the object and reference beam and the actual instrument can accommodate a wide thickness measurement range.
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Ulrich Breitmeier, Klaus Leonhardt, "Short coherence transmitted light interferometer for the thickness measurement of Si membranes", Proc. SPIE 5457, Optical Metrology in Production Engineering, (10 September 2004); doi: 10.1117/12.544492; https://doi.org/10.1117/12.544492
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