CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume 5457 > Article
Translator Disclaimer
Paper
10 September 2004 3D shape measurement of nozzles on the micrometric scale
Ferran Laguarta, Roger Artigas, Cristina Cadevall
Author Affiliations +
Proceedings Volume 5457, Optical Metrology in Production Engineering; (2004) https://doi.org/10.1117/12.545673
Event: Photonics Europe, 2004, Strasbourg, France
Abstract
One of the most challenging applications of optical metrology is measuring the shape of the inner surfaces of nozzles such as those of fuel injectors, wiring dies and printheads. A current non-contact solution is confocal laser scanning microscopy (CLSM). However, the inner urfaces of the nozzles behave as though they were optically polished, which gives rise to very weak, backscattered light signals. Therefore, measuring with CLSM is a very slow process and the uncertainty of the results is very high. Moreover, new nozzle designs are moving towards even steeper walls, which means that CLSM may well become useless in the near future. In this paper, we introduce a new method based on a proprietary unfolded confocal arrangement, which uses the light that is reflected onto the inner surfaces and that passes through the nozzle instead of the backscattering signal. The setup and implementation of this new method and the attendant profiling algorithms are explained. With regard to real applications, we focus on measuring the 3D topography of conical nozzles drilled into organic polymer films with excimer lasers. These films are used in the manufacture of the orifice plates, which are attached to the printheads of thermal inkjet cartridges. Fast measurements and accurate results obtained for nozzles of 25 micrometers in diameter and wall angles close to 17º are demonstrated.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Ferran Laguarta, Roger Artigas, and Cristina Cadevall "3D shape measurement of nozzles on the micrometric scale", Proc. SPIE 5457, Optical Metrology in Production Engineering, (10 September 2004); https://doi.org/10.1117/12.545673
ACCESS THE FULL ARTICLE
PERSONAL SIGN IN
Full access may be available with your subscription
Forgot your username?
Forgot your password?
No SPIE account? Create an account
Institutional Access:
Sign in with your institutional credentials
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 9 PAGES
DOWNLOAD PAPER SAVE TO MY LIBRARY
SHARE
GET CITATION
Advertisement
Advertisement
KEYWORDS
3D metrology
Charge-coupled devices
Confocal microscopy
Printing
Excimer lasers
Objectives
Surface finishing
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top