17 August 2004 A miniaturized SNOM sensor based on the optical feedback inside the VCSEL cavity
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Abstract
We propose and demonstrate an original concept of a near-field sensor using the optical feedback properties of a vertical cavity surface-emitting laser as an active principle of detection. This is based on the monitoring perturbations induced in the laser cavity by the backscattered light coming from the specimen. Test images confirm the efficiency of proposed SNOM microscope and a solution for the integration of proposed architecture is given.
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Christophe Gorecki, Christophe Gorecki, Dominique Heinis, Dominique Heinis, } "A miniaturized SNOM sensor based on the optical feedback inside the VCSEL cavity", Proc. SPIE 5458, Optical Micro- and Nanometrology in Manufacturing Technology, (17 August 2004); doi: 10.1117/12.546003; https://doi.org/10.1117/12.546003
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