17 August 2004 Analysis of static and dynamic operational behavior of active micromembranes
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The paper describes methodology, instrumentation, and experiments for the study of the mechanical behavior of MEMS, especially active micromembranes. The technique of speckle interferometry is extended to high microscopic magnification and short wavelength of laser light and two corresponding interferometric solutions are discussed. Challenging issues for the optical measurement are the micrometer lateral size of the details, the nanometer deflection, and the Megahertz frequencies of resonant vibrations. Micromembrane arrays different in size and shape were analysed with respect to piezo response, resonance, and cross-talk. Systematic investigations revealed the complex micromechanical behavior of the microstructures.
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Petra Aswendt, Thierry Dean, "Analysis of static and dynamic operational behavior of active micromembranes", Proc. SPIE 5458, Optical Micro- and Nanometrology in Manufacturing Technology, (17 August 2004); doi: 10.1117/12.547720; https://doi.org/10.1117/12.547720

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