17 August 2004 Application of the vortex transform to microscopic interferometry
Author Affiliations +
Abstract
Interferogram analysis techniques able to compute phase or contrast maps from a single interferogram are useful for fast measurements of surface profiles, of out-of-plane displacement fields under thermal or mechanical loading, and of vibration mode shapes. Well known single interferogram techniques are Fast Fourier Transform (FFT) analysis, spatial carrier phase stepping and synchronous detection techniques. These techniques typically need a sample tilting to introduce a fringe spatial carrier and fail when the interferograms contain closed fringes. A 2D fringe pattern demodulation technique which overcomes these limitations is the Vortex Transform method proposed recently by K.G. Larkin et al. In this paper a fully automated version of this technique is described. Then it applied on real interferograms recorded on microdevices by microscopic homodyne interferometry is demonstrated.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sylvain Petitgrand, Sylvain Petitgrand, Alain Bosseboeuf, Alain Bosseboeuf, Matthieu Guirardel, Matthieu Guirardel, } "Application of the vortex transform to microscopic interferometry", Proc. SPIE 5458, Optical Micro- and Nanometrology in Manufacturing Technology, (17 August 2004); doi: 10.1117/12.545509; https://doi.org/10.1117/12.545509
PROCEEDINGS
7 PAGES


SHARE
Back to Top