17 August 2004 Interferometric methods for static and dynamic characterizations of micromembranes for sensing functions
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Abstract
We present a methodology for static and dynamic testing of mechanical properties of microelements. The measurement path includes temporal phase shifting interferometry for quantitative static shape elements analysis. This is followed by determination of the resonance frequency by means of modified time average interferometry and transient amplitude and phase maps of vibrating micromembrane capturing and evaluation by phase shifting stroboscopic interferometry. Proper application of combination of these methods allows for quick and accurate analysis of micromembranes and optimization of their manufacturing conditions.
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Leszek Salbut, Leszek Salbut, Jacek Kacperski, Jacek Kacperski, Adam R. Styk, Adam R. Styk, Michal Jozwik, Michal Jozwik, Christophe Gorecki, Christophe Gorecki, Hakan Urey, Hakan Urey, Alain Jacobelli, Alain Jacobelli, Thierry Dean, Thierry Dean, } "Interferometric methods for static and dynamic characterizations of micromembranes for sensing functions", Proc. SPIE 5458, Optical Micro- and Nanometrology in Manufacturing Technology, (17 August 2004); doi: 10.1117/12.545574; https://doi.org/10.1117/12.545574
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