17 August 2004 Metrology of refractive microlens arrays
Author Affiliations +
Abstract
The metrology of refractive microlens arrays is analyzed using Twyman-Green, Mach-Zehnder, and white light interferometers. The advantages and limitations of each are discussed in their application to the measurement of spherical and aspherical microlens arrays.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kenneth J. Weible, Reinhard Volkel, Martin Eisner, Samuel Hoffmann, Toralf Scharf, Hans-Peter Herzig, "Metrology of refractive microlens arrays", Proc. SPIE 5458, Optical Micro- and Nanometrology in Manufacturing Technology, (17 August 2004); doi: 10.1117/12.545458; https://doi.org/10.1117/12.545458
PROCEEDINGS
9 PAGES


SHARE
KEYWORDS
Microlens

Interferometers

Microlens array

Aspheric lenses

Spherical lenses

Metrology

Wavefronts

Back to Top