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17 August 2004 Metrology of refractive microlens arrays
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Abstract
The metrology of refractive microlens arrays is analyzed using Twyman-Green, Mach-Zehnder, and white light interferometers. The advantages and limitations of each are discussed in their application to the measurement of spherical and aspherical microlens arrays.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kenneth J. Weible, Reinhard Volkel, Martin Eisner, Samuel Hoffmann, Toralf Scharf, and Hans-Peter Herzig "Metrology of refractive microlens arrays", Proc. SPIE 5458, Optical Micro- and Nanometrology in Manufacturing Technology, (17 August 2004); https://doi.org/10.1117/12.545458
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