Modified linear and circular carrier-frequency Fourier-transform method applied for studies of vibrating microelements

Jacek Kacperski; Malgorzata Kujawinska; Jerzy Krezel

doi:10.1117/12.554287

Abstract

Stroboscopic interferometry is the most popular method for investigation of active, vibrating elements. The interferograms obtained in measurement steps may be analysed by temporal phase shifting method or by spatial carrier frequency methods. The first one requires sequential capturing of phase-shifted interferograms which complicates the measurement system and introduces high stability requirements for the setup. The spatial methods need a single interferogram with a proper spatial carrier frequency (SCF), so they are more suitable for dynamic events analysis. The most frequently used spatial method is based on Fourier transform of an interferogram with linear SCF and can be applied to analysis of restricted class of elements represented by quasi-linear fringes. This can be easily expanded by considering elements with circular carrier fringes (CCF). In the paper two approaches to analysis of interferograms with CCF, namely: coordinate transform Fourier transform technique and direct filtering Fourier transform technique are explained. The error analysis of both techniques applied for different classes of interferograms is presented. The methodology of CCF interferogram analysis based on FT methods applied for micromembranes is presented and several exemplary results are given.

Citation Download Citation

Jacek Kacperski, Jacek Kacperski, Malgorzata Kujawinska, Malgorzata Kujawinska, Jerzy Krezel, Jerzy Krezel, } "Modified linear and circular carrier-frequency Fourier-transform method applied for studies of vibrating microelements", Proc. SPIE 5458, Optical Micro- and Nanometrology in Manufacturing Technology, (17 August 2004); doi: 10.1117/12.554287; https://doi.org/10.1117/12.554287

ACCESS THE FULL ARTICLE

PERSONAL SIGN IN
Full access may be available with your subscription

Email or Username Forgot your username?

Password Forgot your password?

Show

Remember Email/Username on this computer

Remember Password

No SPIE account? Create an account
or Institutional Sign In via Shibboleth

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $14.40

Non-members: $18.00 ADD TO CART

Show All Keywords

Keywords/Phrases

Search In:

Publication Years