17 August 2004 Stroboscopic illumination and synchronous imaging for the characterization of MEMS vibrations
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Abstract
In this paper, we present a versatile vibrometer developed to characterize in-plane responses of MEMS. This system can be used either in microscope configuration for very small displacements (nanometer resolution) or in macro configuration for large range of displacement measurements (field of view up to 10 x 10 mm with sub-pixel accuracy). The system is based both on an homemade stroboscope with incremental phase shifts and a digital CCD camera to record a video sequence of the moving MEMS "frozen" by a strobe LED at four equally spaced phases. The periodic motion of the specimen is accurately estimated by computing the value of the displacements between successive images. We have used an interpolation-correlation based image motion estimation algorithm with subpixel accuracy. Both, experimental setup and stroboscopic module used for MEMS motion measurements are described. The correlation estimation method used to calculate the displacements with subpixel accuracy between consecutive frames is also described. Using the vibrometer we have investigated the mode shapes of a silicium cantilever beam with a large field of view, and a subpixel resolution. The experimental measurements are shown to be in good agreement with analytical predictions.
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Bruno Serio, Jean-Jacques Hunsinger, Bernard Cretin, "Stroboscopic illumination and synchronous imaging for the characterization of MEMS vibrations", Proc. SPIE 5458, Optical Micro- and Nanometrology in Manufacturing Technology, (17 August 2004); doi: 10.1117/12.545586; https://doi.org/10.1117/12.545586
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KEYWORDS
Microelectromechanical systems

Cameras

Silicon

Beam shaping

Image processing

Image resolution

Motion estimation

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