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1 September 2004 Confocal micro-optical distance sensor for precision metrology
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Increasing demands for controlling tolerances of small mechanical and optical components require improved measurement techniques. In particular, components with a complex geometry such as small holes or channels are difficult to access by classical tactile measurement systems. These systems are also limited in their measurement speed. Optical distance sensors do not have many of these disadvantages, but the sensor heads are normally too large to access e.g. small holes. Presented in this paper is a novel microoptical sensor concept using the chromatic confocal principle for distance gauging applications. This is used in high aspect ratio cavities with a diameter of about 2 mm. The distance resolution of the sensor is aimed to be in the sub-micrometer range.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Peter Luecke, Arndt Last, Juergen Mohr, Aiko Ruprecht, Wolfgang Osten, Hans J. Tiziani, and Peter Lehmann "Confocal micro-optical distance sensor for precision metrology", Proc. SPIE 5459, Optical Sensing, (1 September 2004);


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