Highly sensitive and selective WO3 nanoparticle gas sensor operating in thermally modulated dynamic mode

Radu Ionescu; Anders Hoel; Claes-Goran Granqvist; Eduard Llobet; Peter Heszler

doi:10.1117/12.547235

25 May 2004 Highly sensitive and selective WO₃ nanoparticle gas sensor operating in thermally modulated dynamic mode

Radu Ionescu, Anders Hoel, Claes-Goran Granqvist, Eduard Llobet, Peter Heszler

Proceedings Volume 5472, Noise and Information in Nanoelectronics, Sensors, and Standards II; (2004) https://doi.org/10.1117/12.547235
Event: Second International Symposium on Fluctuations and Noise, 2004, Maspalomas, Gran Canaria Island, Spain

Abstract

Nanoparticle films of crystalline WO₃, designed for gas sensing applications, were deposited on alumina substrates by reactive gas deposition. H₂S, ethanol vapour, and binary mixtures of ethanol/H₂S, ethanol/NO₂ and H₂S/NO₂ were used in different concentrations for testing the performance of the sensor device. The sensor was operated in dynamic mode by modulating its temperature between 150 and 250 °C. Coefficients were extracted by applying Fast Fourier Transform (FFT) and Discrete Wavelet Transform (DWT) methods to the dynamic resistance response of the sensor. These coefficients were then used as inputs for pattern recognition methods to extract both quantitative (concentration) and qualitative (chemical selectivity) information about the test gases. After sensor calibration, it was possible to detect as little as 200 ppb of ethanol and 20 ppb of H2S with good accuracy. Furthermore, ethanol and H₂S could be detected with good sensitivity and selectivity in the presence of both reducing and oxidising gases.

Citation Download Citation

Radu Ionescu, Anders Hoel, Claes-Goran Granqvist, Eduard Llobet, and Peter Heszler "Highly sensitive and selective WO₃ nanoparticle gas sensor operating in thermally modulated dynamic mode", Proc. SPIE 5472, Noise and Information in Nanoelectronics, Sensors, and Standards II, (25 May 2004); https://doi.org/10.1117/12.547235

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