Optical correlation diagnostics of rough surfaces: statistical and fractal approach

Oleg V. Angelsky; Peter P. Maksimyak; Dimitry N. Burcovets; I. M. Grigiraschuk

doi:10.1117/12.559766

4 June 2004 Optical correlation diagnostics of rough surfaces: statistical and fractal approach

Oleg V. Angelsky, Peter P. Maksimyak, Dimitry N. Burcovets, I. M. Grigiraschuk

Proceedings Volume 5477, Sixth International Conference on Correlation Optics; (2004) https://doi.org/10.1117/12.559766
Event: Sixth International Conference on Correlation Optics, 2003, Chernivsti, Ukraine

Abstract

New feasibilities are considered for optical correlation diagnostics of rough surfaces with different distributions of irregularities. The influence of deviations of the height surface roughness distribution from a Gaussian probability distribution on the accuracy of optical analysis is discussed. The possibilities for optical diagnostics of fractal surface structures are shown and the set of statistical and dimensional parameters of the scattered fields for surface roughness diagnostics is determined. Fast operating measuring devices for roughness control are proposed.

Citation Download Citation

Oleg V. Angelsky, Peter P. Maksimyak, Dimitry N. Burcovets, and I. M. Grigiraschuk "Optical correlation diagnostics of rough surfaces: statistical and fractal approach", Proc. SPIE 5477, Sixth International Conference on Correlation Optics, (4 June 2004); https://doi.org/10.1117/12.559766

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