4 June 2004 Techniques and devices for optical correlation diagnostics of rough surfaces
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Proceedings Volume 5477, Sixth International Conference on Correlation Optics; (2004) https://doi.org/10.1117/12.560200
Event: Sixth International Conference on Correlation Optics, 2003, Chernivsti, Ukraine
Abstract
We propose two techniques for measuring of roughness, based on measurement of a phase variance of the boundary object field and on a transverse coherence function of a field, as well as the devices implementing these techniques.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Oleg V. Angelsky, Peter P. Maksimyak, "Techniques and devices for optical correlation diagnostics of rough surfaces", Proc. SPIE 5477, Sixth International Conference on Correlation Optics, (4 June 2004); doi: 10.1117/12.560200; https://doi.org/10.1117/12.560200
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