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11 October 2004 Evaluation of an ultra-high-precision x-ray optics
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We are developing an ultra high precision soft X-ray telescope. The design of the telescope is a normal incident one for 13.5nm band using Mo/Si multilayers. Two ideas are introduced. One is the optical measurement system in order to monitor the precision of the optics system. The other is the adaptive optics system with a deformable mirror. Using an X-ray-optical separation filter, we can always monitor the deformation of the optics by optical light. With this information, we can control the deformable mirror to compensate the system distortion as a closed loop system. The telescope system is now integrating and checking by optical light. The shape of the primary mirror is an off-axis paraboloid with a focal length of 2m and an effective diameter of 80mm. This primary mirror was coated by Mo/Si multilayers. The reflectivity of the primary mirror at 13.5nm was ranging from 30 to 50 %. The secondary mirror is a basically flat mirror but actually an deformable mirror with 31 piezo-actuators. The detector is now a wave front sensor (shack-hartmann type). The closed loop control has been performed and factor of 2.4 improvement of the wave front shape has been performed comparing to the un-control case.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shunji Kitamoto, Norimasa Yamamoto, Takayoshi Kohmura, Kazuharu Suga, Hiroyuki Sekiguchi, Youhei Ohkawa, Junichi Kanai, Shigeto Chiba, Junichi Sato, Keisuke Sudo, and Takeshi Watanabe "Evaluation of an ultra-high-precision x-ray optics", Proc. SPIE 5488, UV and Gamma-Ray Space Telescope Systems, (11 October 2004);


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