29 September 2004 Development of fully depleted back-illuminated charge-coupled devices
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Abstract
The status of CCD development efforts at Lawrence Berkeley National Laboratory is reviewed. Fabrication technologies for the production of back-illuminated, fully depleted CCD's on 150 mm diameter wafers are described. In addition, preliminary performance results for high-voltage compatible CCD's, including a 3512 x 3512, 10.5 μm pixel CCD for the proposed SuperNova Acceleration Probe project, are presented.
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Christopher J. Bebek, Christopher J. Bebek, Donald E. Groom, Donald E. Groom, Stephen E. Holland, Stephen E. Holland, Armin Karcher, Armin Karcher, William F. Kolbe, William F. Kolbe, Nick P. Palaio, Nick P. Palaio, Natalie A. Roe, Natalie A. Roe, Bojan T. Turko, Bojan T. Turko, Guobin Wang, Guobin Wang, } "Development of fully depleted back-illuminated charge-coupled devices", Proc. SPIE 5499, Optical and Infrared Detectors for Astronomy, (29 September 2004); doi: 10.1117/12.552295; https://doi.org/10.1117/12.552295
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