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29 September 2004 Wafer-scale scientific CCDs at Fairchild Imaging
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Abstract
Fairchild Imaging has established a unique capability for high volume production of wafer-scale, scientific grade CCD (charge-coupled device) image sensors with active areas ranging from 6 x 6 cm, with 16 million pixels, to 8 x 8 cm devices with 85 million pixels. Large format back-illuminated CCDs are currently in volume production. This paper provides a detailed description of two recent products, and the technologies associated with their development.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Paul Vu, Steven Onishi, and Robert Potter "Wafer-scale scientific CCDs at Fairchild Imaging", Proc. SPIE 5499, Optical and Infrared Detectors for Astronomy, (29 September 2004); https://doi.org/10.1117/12.562492
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