Paper
1 March 1974 A Pioneering Step And Repeat Camera
Robert E. Lewis, Philip E. Chandler
Author Affiliations +
Abstract
Before commercial cameras were available, a twelve barrel step and repeat camera was constructed using one light source. Magnification adjustment, plate flatness, azimuthal control, pulsed exposure, grid register, random interconnection and also maintenance methods devised are summarised. A matched reduction camera completed the system.
© (1974) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Robert E. Lewis and Philip E. Chandler "A Pioneering Step And Repeat Camera", Proc. SPIE 0055, Technological Advances in Micro and Submicro Photofabrication Imagery, (1 March 1974); https://doi.org/10.1117/12.954244
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KEYWORDS
Cameras

Glasses

Photomasks

Objectives

Semiconductors

Lamps

Imaging systems

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