Paper
1 March 1974 New Developments In The Technology Of Micro-Reduction Cameras
Harris Lee Cooperman
Author Affiliations +
Abstract
Recently, the Electronics industry has been in a period of rapid growth caused by several coincident factors. It is partially due to the over-contraction that the industry made during the early seventies as well as to a renewed market in some product areas with rapid development in new product areas. Probably the greatest single part of the industry enduring the greatest growth is that part involved with micro-electronics.
© (1974) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Harris Lee Cooperman "New Developments In The Technology Of Micro-Reduction Cameras", Proc. SPIE 0055, Technological Advances in Micro and Submicro Photofabrication Imagery, (1 March 1974); https://doi.org/10.1117/12.954259
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KEYWORDS
Cameras

Imaging systems

Reticles

Microscopes

Image resolution

Photomasks

Manufacturing

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