29 September 2004 GaAs arrays for x-ray spectroscopy
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Proceedings Volume 5501, High-Energy Detectors in Astronomy; (2004); doi: 10.1117/12.552930
Event: SPIE Astronomical Telescopes + Instrumentation, 2004, Glasgow, United Kingdom
Abstract
We present results from our compound semiconductor laboratory program and describe the development of a large area GaAs imaging array for planetary remote sensing applications. The device is fabricated from ~150 micron thick epitaxial material, patterned into a 64 x 64 pixel array, back-thinned and contacted. It will be flip-chip bump bonded onto a custom designed, fully spectroscopic, low noise (< 20 e- rms) active pixel sensor ASIC. At present, the ASIC is still under development and so in order to validate and qualify the various technological steps, we have produced a GaAs imager based on the MEDIPIX-1 format using a MEDIPIX-1 readout chip. In X-ray tests, the device was found to work well with a bump yield of 99.9%. After flat field corrections, the spatial uniformity of the array was commensurate with Poisson noise.
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Alan Owens, Hans Andersson, M. Campbell, David H. Lumb, Seppo Arvo Anter Nenonen, Lukas Tlustos, "GaAs arrays for x-ray spectroscopy", Proc. SPIE 5501, High-Energy Detectors in Astronomy, (29 September 2004); doi: 10.1117/12.552930; https://doi.org/10.1117/12.552930
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KEYWORDS
Gallium arsenide

X-rays

Sensors

X-ray imaging

Silicon

Image resolution

Spectroscopy

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