7 July 2004 Properties of humidity sensors with porous Al2O3 as a dielectric layer
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Proceedings Volume 5505, Optical Methods, Sensors, Image Processing, and Visualization in Medicine; (2004) https://doi.org/10.1117/12.577909
Event: Optical Methods, Sensors, Image Processing, and Visualization in Medicine, 2003, Gdansk, Poland
Abstract
The effect of humidity influence on characteristics of a ceramic sensor with a porous dielectric Al2O3 layer is presented. Influence of chosen electrolytic process parameters on electrical properties of the sensor is shown. The experimental data of two groups of sensors are interpreted using two, known from literature, electric equivalent circuits.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bogdan Chachulski, Bogdan Chachulski, Grzegorz Jasinski, Grzegorz Jasinski, Teresa Zajt, Teresa Zajt, Antoni Nowakowski, Antoni Nowakowski, Piotr Jasinski, Piotr Jasinski, } "Properties of humidity sensors with porous Al2O3 as a dielectric layer", Proc. SPIE 5505, Optical Methods, Sensors, Image Processing, and Visualization in Medicine, (7 July 2004); doi: 10.1117/12.577909; https://doi.org/10.1117/12.577909
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