Electron energy distribution function in a hollow-cathode glow discharge in mixtures of nitrogen with electronegative gases

Anna G. Kalyuzhnaya; Andrew V. Ryabtsev; Anatoliy I. Shchedrin

doi:10.1117/12.570023

20 July 2004 Electron energy distribution function in a hollow-cathode glow discharge in mixtures of nitrogen with electronegative gases

Anna G. Kalyuzhnaya, Andrew V. Ryabtsev, Anatoliy I. Shchedrin

Author Affiliations +

Proceedings Volume 5507, XVI International Conference on Spectroscopy of Molecules and Crystals; (2004) https://doi.org/10.1117/12.570023
Event: XVI International Conference on Spectroscopy of Molecules and Crystals, 2003, Sevastopol, Ukraine

Abstract

The electron energy distribution function (EEDF) in a hollow-cathode glow discharge in mixtures of nitrogen with electronegative gases is investigated. It is shown that small admixtures of SF₆ or CCI₄ to nitrogen significantly increase the number of electrons in the energy range 2-6 eV which corresponds to the inverse part of the EEDF .In nitrogen with small admixtures of F₂ or NF₃, the EEDF differs slightly from that calculated for pure nitrogen. The EEDF in these mixtures substantially depends on electron attachment to electronegative gas molecules.

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Anna G. Kalyuzhnaya, Andrew V. Ryabtsev, and Anatoliy I. Shchedrin "Electron energy distribution function in a hollow-cathode glow discharge in mixtures of nitrogen with electronegative gases", Proc. SPIE 5507, XVI International Conference on Spectroscopy of Molecules and Crystals, (20 July 2004); https://doi.org/10.1117/12.570023

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