Nanostructured diffractive optical elements on SiNX membrane for UV-visible regime applications

Chien Chieh Lee; Chih Ming Wang; Che Lung Xu; Jing Yi Chen; Jenq Yang Chang; Yi Ming Liao; Gou Chung Chi

doi:10.1117/12.559296

8 October 2004 Nanostructured diffractive optical elements on SiN_X membrane for UV-visible regime applications

Chien Chieh Lee, Chih Ming Wang, Che Lung Xu, Jing Yi Chen, Jenq Yang Chang, Yi Ming Liao, Gou Chung Chi

Proceedings Volume 5515, Nanoengineering: Fabrication, Properties, Optics, and Devices; (2004) https://doi.org/10.1117/12.559296
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

Silicon nitride (SiN_X) film is a commonly used material in silicon technology. In addition, it has excellent optical properties. It is transparent in both the UV and visible range, with a high refractive index of about 1.7~2. Owing to its superior mechanical and optical properties, we used a silicon nitride membrane as an optical phase element. We will fabricate nano-structured diffractive optical elements, such as wave-plate, polarizer, and polarized beam splitter on SiNXHY membrane by e-beam lithography for the UV-visible regime applications. The SiNXHY membranes were made from SiN_XH_Y films deposited by an plasma enhanced chemical vapor deposition (PECVD) as an alternative method for low stress membrane fabrication used in UV-visible transmittance. The stress of silicon nitride film showed a change from compressive to tensile with increasing working pressure during film deposition. The UV-visible transmittance of the free standing membrane was measured, which showed that UV light is transparent at wavelength as short as 240nm. We will show the feasibility to fabricate nano-structured diffractive optical elements on the SiN_XH_Y membrane combined with microoptoelectromechanical systems (MOEMS) technology for the application in the UV-visible regimes.

Citation Download Citation

Chien Chieh Lee, Chih Ming Wang, Che Lung Xu, Jing Yi Chen, Jenq Yang Chang, Yi Ming Liao, and Gou Chung Chi "Nanostructured diffractive optical elements on SiN_X membrane for UV-visible regime applications", Proc. SPIE 5515, Nanoengineering: Fabrication, Properties, Optics, and Devices, (8 October 2004); https://doi.org/10.1117/12.559296

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