8 October 2004 Novel biomedical implant interconnects utilizing micromachined LCP
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Abstract
Micro- and nano-MEMS technology is being increasingly exploited in biomedical applications, such as large electrode-count neural prosthesis probe arrays. However, a bottleneck in fully utilizing this technology has been the interconnect between the implanted MEMS device and the external system connected to the implanted device. Since the implanted MEMS device is capable of having a large number of elements, the interconnect must have a sufficient number of electrical connections to communicate with each and every element. Complicating this is the fact that the interconnect requirements may include electrical signals, microfluidics transport and optical signals, all packaged in a miniature biocompatible interconnect cable. Micromachined liquid crystal polymer (LCP) is a promising technology for this application, due to LCP's biocompatibility, chemical inertness, electromechanical properties and its ability to be micromachined. This paper presents the results from the development of surface micromachining techniques compatible with LCP, and is demonstrated in the realization of a prototype micromachined LCP biomedical interconnect device. In particular, the development of the interconnect device demonstrates the realization of biocompatible connectors with high-density ultra-fine pitch electrical traces.
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Robert Neal Dean, Jenny Weller, Michael Bozack, Brian Farrell, Linas Jauniskis, Joseph Ting, David Edell, Jamille Hetke, "Novel biomedical implant interconnects utilizing micromachined LCP", Proc. SPIE 5515, Nanoengineering: Fabrication, Properties, Optics, and Devices, (8 October 2004); doi: 10.1117/12.559831; https://doi.org/10.1117/12.559831
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