8 October 2004 Silicon-based guided-mode resonance nanophotonic device
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Abstract
An out-of-plane guided-mode resonance (GMR) filter on a single Si chip using a two-layer polysilicon surface micromachining process was proposed. To the best of our knowledge, this is the first time that a monolithic optical filter has been integrated on a silicon microoptical bench. This device can be used as a bi-directional transceiver filter. The extinction ratio between 1550nm and 1310nm could be as low as 40dB and the channel passband at 1550nm was 20nm.
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Chih Ming Wang, Che Lung Xu, Jenq Yang Chang, Chien Chieh Lee, "Silicon-based guided-mode resonance nanophotonic device", Proc. SPIE 5515, Nanoengineering: Fabrication, Properties, Optics, and Devices, (8 October 2004); doi: 10.1117/12.559209; https://doi.org/10.1117/12.559209
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KEYWORDS
Silicon

Optical filters

Surface micromachining

Waveguides

Refractive index

Transceivers

Diffraction gratings

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