Design and fabrication of microlens by microfluidic deposition method

Chin-Tai Chen; Chin-Long Chiu; Ji-Bin Horng

doi:10.1117/12.557514

14 October 2004 Design and fabrication of microlens by microfluidic deposition method

Chin-Tai Chen, Chin-Long Chiu, Ji-Bin Horng

Proceedings Volume 5523, Current Developments in Lens Design and Optical Engineering V; (2004) https://doi.org/10.1117/12.557514
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

The paper presents a new processing method for design and fabrication of microlens by microfluidic deposition, in which the lenses can be formed on the media with high precise location in the fabrication process. First we may apply physical vaporization deposition (PVD) or spin coating to fabricate a thin film; secondly, the hydrophilic pattern specified by the mask of lenses can be created by photolithography, where the special lens media is made herein. Finally, the liquid solution of lens material is deposited onto the predetermined location of the lens media by the drop-on-demand fluidic actuator; thus, the microlenses are consequently formed after the complete evaporation of solvent in the solution.

Citation Download Citation

Chin-Tai Chen, Chin-Long Chiu, and Ji-Bin Horng "Design and fabrication of microlens by microfluidic deposition method", Proc. SPIE 5523, Current Developments in Lens Design and Optical Engineering V, (14 October 2004); https://doi.org/10.1117/12.557514

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