Translator Disclaimer
14 October 2004 Design and fabrication of microlens by microfluidic deposition method
Author Affiliations +
Abstract
The paper presents a new processing method for design and fabrication of microlens by microfluidic deposition, in which the lenses can be formed on the media with high precise location in the fabrication process. First we may apply physical vaporization deposition (PVD) or spin coating to fabricate a thin film; secondly, the hydrophilic pattern specified by the mask of lenses can be created by photolithography, where the special lens media is made herein. Finally, the liquid solution of lens material is deposited onto the predetermined location of the lens media by the drop-on-demand fluidic actuator; thus, the microlenses are consequently formed after the complete evaporation of solvent in the solution.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Chin-Tai Chen, Chin-Long Chiu, and Ji-Bin Horng "Design and fabrication of microlens by microfluidic deposition method", Proc. SPIE 5523, Current Developments in Lens Design and Optical Engineering V, (14 October 2004); https://doi.org/10.1117/12.557514
PROCEEDINGS
9 PAGES


SHARE
Advertisement
Advertisement
RELATED CONTENT

Direct fabrication of polymer micro-lens array
Proceedings of SPIE (June 25 2017)
Surface profilometry of a thick liquid lens on a solid...
Proceedings of SPIE (November 10 1999)
UV cured lenses: applied electric fields
Proceedings of SPIE (October 13 2004)
Microlenses made with emulsion techniques
Proceedings of SPIE (August 18 2010)

Back to Top