22 October 2004 Design and fabrication of Si-based pickup module for optical storage
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We have proposed a miniaturized optical signal pickup module comprised of several SiNX membrane devices on stacked Si substrates for use in optical storage system. The optical module was designed to include not only light sources and detectors, but also the diffractive optical elements (DOEs), which can be made with microoptoelectromechanical systems (MOEMS) technology. Its optical operation was simulated by ray-tracing to have an optimized spot size (~0.6μm) focused on the disk with setting the tolerance of each element for the alignment. All these Si-based transmission optical elements were fabricated and can be stacked by self-alignment bonding for system assembly.
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Chien Chieh Lee, Chien Chieh Lee, Chih Ming Wang, Chih Ming Wang, Jenq Yang Chang, Jenq Yang Chang, Gou Chung Chi, Gou Chung Chi, } "Design and fabrication of Si-based pickup module for optical storage", Proc. SPIE 5524, Novel Optical Systems Design and Optimization VII, (22 October 2004); doi: 10.1117/12.559258; https://doi.org/10.1117/12.559258

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