22 October 2004 Realization of optical pickup head by using stacked silicon-based micro-optical system
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Abstract
We have developed a novel stacked silicon-based microoptical system, which is optical-on-axis and transmissible in both visible and infrared ranges. By using the new microoptical system techniques, we fabricated a miniaturized optical pickup head module. This optical pickup head consisted of a 650nm laser diode, a 45 degrees silicon reflector, a grating, a holographic optical element, and some aspherical Fresnel lenses. These optical phase elements fabricated on a SiNx membrane were free-standing on Si chips. Each element was then stacked by chip bonding. We could obtain a circular focusing spot on the optical disc as small as 3.1um.
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Chih Ming Wang, Hsiao-Chin Lan, Jenq Yang Chang, Chien Chieh Lee, "Realization of optical pickup head by using stacked silicon-based micro-optical system", Proc. SPIE 5524, Novel Optical Systems Design and Optimization VII, (22 October 2004); doi: 10.1117/12.559213; https://doi.org/10.1117/12.559213
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