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29 September 2004 Comparison of diffractive inline and offset beam shaper designs
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Abstract
Beam shaping is becoming a standard requirement for UV (354.7 nm) Diode Pumped Solid State (UV DPSS) lasers used in industrial micromachining applications, such as microvia drilling, micro trimming and laser direct imaging. These applications have very similar requirements and typically involve the shaping of a Gaussian intensity profile into a uniform intensity beam. The most common method for intensity remapping is the use of diffractive optical elements. This paper will evaluate two substantially different designs with similar input and output parameters for beam shaping. One of the designs is an inline diffractive beam reducer and shaper using standard design principles and the second is a beam reduce and shaper that has a linear phase term added to the design to deflect the beam laterally by approximately 5° so that the zero order beam will miss the second element, so as to minimize ringing effects. Techniques for alignment and performance measurements will be discussed as well as an evaluation of the output characteristics, specifically measuring efficiency, beam output uniformity/quality and a basic comparison of the two designs will be presented.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Todd Lizotte and Orest Ohar "Comparison of diffractive inline and offset beam shaper designs", Proc. SPIE 5525, Laser Beam Shaping V, (29 September 2004); https://doi.org/10.1117/12.560629
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