29 September 2004 Ion-assist applications of broad-beam ion sources
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Abstract
Ion-assist applications of broad-beam ion sources are reviewed for ion energies up to about 1 keV. These applications are organized by ion energy and cover a wide range of thin-film technologies. Optimum ion-assist doses are described when available. Except for applications that benefit from specific ion energies, the majority of ion-assist applications are probably done best in the low-energy range that extends from about 25 eV to 100 eV.
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Harold R. Kaufman, Harold R. Kaufman, James M.E. Harper, James M.E. Harper, } "Ion-assist applications of broad-beam ion sources", Proc. SPIE 5527, Advances in Thin Film Coatings for Optical Applications, (29 September 2004); doi: 10.1117/12.559785; https://doi.org/10.1117/12.559785
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