2 August 2004 Fringe spacing in white-light interferometry
Author Affiliations +
Abstract
Interference microscopes use quasi-monochromatic, broad band, and white light illumination for surface topography measurement. Fringe spacing for quasi-monochromatic illumination changes with the numerical aperture of system, and these changes have been previously examined by others. In this article we compare changes in fringe spacing for white light and broad band illumination for objectives with a numerical aperture of 0.13 and 0.55. We find that white light fringe spacing changes with tilt of the object much faster than for monochromatic illumination. We also investigate the influence of reference mirror tilt on changes in white light fringe spacing.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Joanna Schmit, Joanna Schmit, Paul Unruh, Paul Unruh, Der-Shen Wan, Der-Shen Wan, } "Fringe spacing in white-light interferometry", Proc. SPIE 5531, Interferometry XII: Techniques and Analysis, (2 August 2004); doi: 10.1117/12.563911; https://doi.org/10.1117/12.563911
PROCEEDINGS
8 PAGES


SHARE
Back to Top